LEO BERLINGHIERI

Corporate Board Profile

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ONTO INNOVATION INC.

Filing Date Source Excerpt
2020-04-03 Mr. Berlinghieri served as Chief Executive Officer and President of MKS Instruments, Inc.... Independent Director... Board Committee(s): Nominating & Governance (Chair), Compensation... The total compensation earned by Mr. Berlinghieri during 2019 while serving as a Rudolph Director when added to the amounts reported in the Director Compensation Table above results in total compensation for the full calendar year of $21,250.
2021-04-01 Leo Berlinghieri Director Since: September 2008 Age: 67 Independent Status: Independent Director Board Committee(s): Nominating & Governance (Chair) For the fiscal year ended December 26, 2020, the directors, excluding the directors who are employees, received total compensation indicated in the table below. Leo Berlinghieri $262,307 total compensation.
2022-03-31 Leo Berlinghieri Director Since: September 2008 Age: 68 Independent Status: Independent Director Board Committee(s): Nominating & Governance (Chair), Compensation ...For the fiscal year ended January 1, 2022, the directors, excluding the directors who are employees, received total compensation indicated in the table below...Leo Berlinghieri $241,125 total compensation.
2023-03-30 Leo Berlinghieri Director Since: July 2008 Age: 69 Independent Status: Independent Director Board Committee(s): Nominating & Governance (Chairperson), Compensation 2022 compensation: $238,616
2024-04-05 From July 2005 to December 2013, Mr. Berlinghieri served as President & Chief Executive Officer of MKS Instruments, Inc., a critical subsystem and instrument provider to the semiconductor industry.

Data sourced from SEC filings. Last updated: 2025-08-30