LEO BERLINGHIERI

Corporate Board Profile

Tech Score: 0/100

MKS INSTRUMENTS INC

Filing Date	Source Excerpt
2013-03-14	Leo Berlinghieri Mr. Berlinghieri has served as our director and as our Chief Executive Officer since February 2013, and served as director, Chief Executive Officer and President from July 2005 until February 2013. He previously served as our President and Chief Operating Officer from April 2004 to July 2005, and as our Vice President and Chief Operating Officer from July 2003 until April 2004. From November 1995 to July 2003, he served as our Vice President, Global Sales and Service. From 1980 to November 1995, he served in various management positions of MKS, including Manufacturing Manager, Production and Inventory Control Manager, and Director of Customer Support Operations. Mr. Berlinghieri has served as a director of Massachusetts High Technology Council since May 2012 and has served as a director of Rudolph Technologies, Inc. since September 2008. Mr. Berlinghieri’s over 30 years of experience within the Company gives him particularly deep insight into the organization.

Filing Date

Source Excerpt

2013-03-14

Leo Berlinghieri Mr. Berlinghieri has served as our director and as our Chief Executive Officer since February 2013, and served as director, Chief Executive Officer and President from July 2005 until February 2013. He previously served as our President and Chief Operating Officer from April 2004 to July 2005, and as our Vice President and Chief Operating Officer from July 2003 until April 2004. From November 1995 to July 2003, he served as our Vice President, Global Sales and Service. From 1980 to November 1995, he served in various management positions of MKS, including Manufacturing Manager, Production and Inventory Control Manager, and Director of Customer Support Operations. Mr. Berlinghieri has served as a director of Massachusetts High Technology Council since May 2012 and has served as a director of Rudolph Technologies, Inc. since September 2008. Mr. Berlinghieri’s over 30 years of experience within the Company gives him particularly deep insight into the organization.

ONTO INNOVATION INC.

Filing Date	Source Excerpt
2020-04-03	Mr. Berlinghieri served as Chief Executive Officer and President of MKS Instruments, Inc.... Independent Director... Board Committee(s): Nominating & Governance (Chair), Compensation... The total compensation earned by Mr. Berlinghieri during 2019 while serving as a Rudolph Director when added to the amounts reported in the Director Compensation Table above results in total compensation for the full calendar year of $21,250.
2021-04-01	Leo Berlinghieri Director Since: September 2008 Age: 67 Independent Status: Independent Director Board Committee(s): Nominating & Governance (Chair) For the fiscal year ended December 26, 2020, the directors, excluding the directors who are employees, received total compensation indicated in the table below. Leo Berlinghieri $262,307 total compensation.
2022-03-31	Leo Berlinghieri Director Since: September 2008 Age: 68 Independent Status: Independent Director Board Committee(s): Nominating & Governance (Chair), Compensation ...For the fiscal year ended January 1, 2022, the directors, excluding the directors who are employees, received total compensation indicated in the table below...Leo Berlinghieri $241,125 total compensation.
2023-03-30	Leo Berlinghieri Director Since: July 2008 Age: 69 Independent Status: Independent Director Board Committee(s): Nominating & Governance (Chairperson), Compensation 2022 compensation: $238,616
2024-04-05	From July 2005 to December 2013, Mr. Berlinghieri served as President & Chief Executive Officer of MKS Instruments, Inc., a critical subsystem and instrument provider to the semiconductor industry.

Source material: SEC submissions metadata and DEF 14A proxy filings from EDGAR. Last updated: 2026-03-22