RUSSELL J. LOW, PH.D.

Software Technology Evidence

3 mention(s) identify RUSSELL J. LOW, PH.D. as having software/technology expertise.

Company	Filing Date	Evidence	Reason
AXCELIS TECHNOLOGIES INC	2023-03-31	Dr. Low is our Executive Vice President, Global Customer and Engineering Operations, a position he assumed in January 2021. The Company has also announced plans to appoint Dr. Low as the President and Chief Executive Officer of the Company in May 2023. Dr. Low joined Axcelis in October 2016 as Executive Vice President, Engineering. Prior to joining the Company, Dr. Low held the position of Vice President of Engineering, MOCVD Business Unit at Veeco Instruments since 2013, prior to which he was Veeco’s Senior Director of Engineering, Molecular Beam Epitaxy Business Unit beginning in 2012. From 2003 to 2012, Dr. Low held a number of positions at Varian Semiconductor Equipment Associates, most recently as Director of Technology. Prior to that, Dr. Low held engineering positions in the thermal processing and ion implant divisions of Applied Materials, Inc. from 1997 to 2003.	Dr. Low has held multiple engineering and technology leadership roles at semiconductor equipment companies, including Director of Technology and Vice President of Engineering, indicating a software-related technical background.
AXCELIS TECHNOLOGIES INC	2024-03-29	Dr. Low joined Axcelis in 2016 as Executive Vice President, Engineering... Prior to joining the Company, Dr. Low held the position of Vice President of Engineering, MOCVD Business Unit at Veeco Instruments... From 2003 to 2012, Dr. Low held a number of positions at Varian Semiconductor Equipment Associates, most recently as Director of Technology.	Dr. Low has held multiple engineering and technology leadership roles in semiconductor companies, including positions in engineering and technology development, indicating strong technical and software-related skills.
AXCELIS TECHNOLOGIES INC	2025-03-31	Dr. Low joined Axcelis in 2016 as Executive Vice President, Engineering... From 2003 to 2012, Dr. Low held a number of positions at Varian Semiconductor Equipment Associates, most recently as Director of Technology. Prior to that, Dr. Low held engineering positions in the thermal processing and ion implant divisions of Applied Materials, Inc.	Dr. Low has held multiple engineering positions in semiconductor companies, including Director of Technology and Vice President of Engineering, indicating technical and engineering expertise likely including programming.