RUSSELL J. LOW

Corporate Board Profile

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AXCELIS TECHNOLOGIES INC

Filing Date Source Excerpt
2023-03-31 Russell J. Low, Ph.D.: new nominee in 2023, age 52 ... Dr. Low is our Executive Vice President, Global Customer and Engineering Operations... The Company has also announced plans to appoint Dr. Low as the President and Chief Executive Officer of the Company in May 2023. ... Russell J. Low ... Total ($) $1,461,804
2024-03-29 Dr. Low is our President and Chief Executive Officer, a position he assumed in May 2023... Russell J. Low, Ph.D.: director since 2023, age 53... Total compensation $4,135,438
2025-03-31 Dr. Low is our President and Chief Executive Officer, a position he assumed in May 2023. ... Russell J. Low, President and Chief Executive Officer ... Total ($) $4,293,508

Source material: SEC submissions metadata and DEF 14A proxy filings from EDGAR. Last updated: 2026-04-14